Applied Materials, Inc. introduced a brand new way to engineer that the wiring of complex logic chips which allows climbing into the 3nm node and outside. While size decrease benefits transistor functionality, the contrary is true from the interconnect wiringsmaller cables have higher electrical resistance that reduces functionality and increases energy consumption. With no materials technology breakthrough, interconnect through resistance would grow with a factor of 10 in the 7nm node into the 3nm node, negating the benefits of transistor scaling.
Applied Materials has generated a brand fresh substances technology solution known as the Endura® Copper Barrier Seed IMS. It’s an Integrated Materials Option that unites seven different process engineering in 1 approach under high vacuum: ALD, PVD, CVD, aluminum reflow, surface treatmentand port technology and metrology. The mix stinks conformal ALD with particular ALD, removing a high-resistivity barrier in the via port. The alternative also has aluminum reflow technologies that permits emptiness free gap fill in slim capabilities. Electrical resistance in the through contact interface is decreased by around 50 per cent, improving processor performance and energy intake, and empowering logic scaling to keep to 3nm and outside. A cartoon of this procedure sequence can be considered at this web link: https://bit.ly/3g8HMe1.
“A smartphone chip has tens of billions of copper interconnects, and wiring already consumes a third of the chip’s power,” said Prabu Raja, Senior Vice President and General Manager of the Semiconductor Products Group at Applied Materials. “Integrating multiple process technologies in vacuum allows us to reengineer materials and structures so that consumers can have more capable devices and longer battery life. This unique, integrated solution is designed to accelerate the performance, power and area-cost roadmaps of our customers.”
The Endura Copper Barrier Seed IMS method is currently used by top foundry-logic clients globally. Added info regarding the system along with other inventions for logic climbing will be discussed in Applied’s 2021 Logic Master Class being preserved today.